摘要
多晶硅铸锭炉内温度场对多晶硅的熔化和凝固过程有着决定性的影响。根据不同工艺条件对加热炉内的温度场进行数值模拟是加热炉设计的重要部分,其中多晶硅铸锭炉边界条件的确定是一个关键问题。建立了多晶硅铸锭炉内温度场计算的数学模型,提出了一种通过PID控制原理对多晶硅铸锭炉边界条件进行反算的方法,并根据反算的边界条件就特定工艺参数下铸锭炉内温度场进行了数值模拟。研究表明,采用PID控制方法可以满足精度要求,从而基于所确定的边界条件模拟的铸锭炉内温度场结果准确。
The temperature distribution in the polycrystalline silicon ingot furnace is significant to the melting and solidification process of the silicon.It is important for the process design to simulate the temperature distribution in different conditions with the precise boundary conditions.A mathematical model of transient heat transfer for solidification of the polycrystalline silicon ingot was built,and a reverse computing method for defining the boundary conditions was provided based on the PID control theory.The numerical results of the temperature distribution in a polycrystalline silicon ingot furnace show that the calculation precision with the PID control method is satisfied.
出处
《系统仿真学报》
CAS
CSCD
北大核心
2010年第7期1614-1617,共4页
Journal of System Simulation
关键词
多晶硅锭
凝固
数值模拟
温度场
polycrystalline silicon ingot
solidification
numerical simulation
temperature distribution
