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基于MEMS开关的可调实时延时器设计

Design of an Adjustable True-Time Delayer Based on RF MEMS Switch
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摘要 为了有效解决相控阵雷达/天线瞬时带宽小、孔径效应严重、功耗大等问题,将射频MEMS开关引入实时可调延时器结构中,设计了一种基于射频MEMS开关的实时可调延时器。通过MEMS双掷开关选择具有不同电长度的延时路径,在DC~20 GHz内实现了5位的射频信号延时。利用HFSS三维电磁仿真软件对延时单元的几何参数进行仿真优化,得到5个可切换延时状态的延时量,分别为64.76 ps,101.46 ps,137.97 ps,174.61 ps,210.98 ps,延时步进为36.5 ps,整体面积约为5 mm^(2)。与其他实时可调延时器相比,该实时可调延时器具有多可控位数、大延时带宽积、高集成度等优点。 To effectively solve the problems of small transient bandwidth,serious aperture effect,and high power consumption of phased array radar/antenna,an RF MEMS switch was introduced into the true-time adjustable delay structure,and an adjustable true-time delayer based on the RF MEMS switch was designed.The delay paths with different electrical lengths were selected by MEMS double-throw switches to achieve 5-bit RF signal delay in DC~20GHz.The geometric parameters of the delay unit were simulated and optimized by using HFSS three-dimensional electromagnetic simulation software.The delay quantities of five switchable delay states are obtained,which are 28.34ps,64.76ps,101.46ps,137.97ps,174.61ps,and 210.98ps,respectively.The delay step is 36.5ps,and the overall area is about 5 mm^(3).Compared with other true-time adjustable delayers,the proposed true-time adjustable delayers has the advantages of multiple controllable bits,a considerable delay bandwidth product and high integration.
作者 史泽民 高旭东 吴倩楠 李孟委 SHI Zemin;GAO Xudong;WU Qiannan;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,P.R.China)
出处 《微电子学》 CAS 北大核心 2023年第1期128-133,共6页 Microelectronics
基金 装备发展部新品资助项目(2019NW0010)
关键词 微机电系统开关 可调实时延时器 实时延时线 群时延 MEMS switch adjustable true-time delayer true-time delay line group delay
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