摘要
本研究通过针对半导体制程不同环节对石英制品性能要求分析、高精度机械加工工艺优化、石英制品热成型组立技术、石英制品抛光退火工艺等多方面研究,制备出符合半导体制程工艺要求的石英制品。本研究的成果有效替代进口产品,提升国产化率、振兴民族工业,促进我国半导体集成电路和国家电子信息产业的健康发展。
In this study,through the analysis of the performance requirements of quartz products in different links of the semiconductor process,the optimization of high-precision machining processes,the thermoforming technology of quartz products,the polishing and annealing process of quartz products,etc.Quartz products.The results of this research can effectively replace imported products,increase the localization rate,revitalize the national industry,and promote the healthy development of my country's semiconductor integrated circuits and the national electronic information industry.
作者
商健宁
刘晓光
秦卫光
谷巨明
王帅
SHANG Jianning;LIU Xiaoguang;QIN Weiguang;GU Jvming;WANG Shuai(Quick Gem Optoelectronic S&T Co.,LTD,LangFang 065000,China)
出处
《功能材料与器件学报》
CAS
2024年第1期48-52,共5页
Journal of Functional Materials and Devices
关键词
半导体
石英舟
指标规范
制备技术
Semiconductor
Quartz boat
Index specification
Preparation technique
