摘要
提出了扩晶装置的结构。该装置可完成片盒、内圈和外圈的输入和取片动作,实现扩晶过程张紧力的调节控制、分离晶圆和衬架、排出空片盒和废弃的衬架等。特别讨论了取片和扩晶动作的结构和原理。各零件和动作相互配合,能用内外圈将晶圆箍牢。该装置可取代手动装置,为各种粘片机提供配套设备。
The structural design of the wafer expansion device was put forward.The device can execute the inputting and taking actions of wafer box,outer rings and inner rings.It can realize the tension control- ling during wafer expanding,wafer separating with the metal plate,empty wafer box and waste metal plate discharging.The structure and principle of the wafer picking and wafer expanding were discussed.All the parts and motion are cooperating with each other;it can make the wafer available.The device can replace...
出处
《包装工程》
CAS
CSCD
北大核心
2007年第9期18-20,共3页
Packaging Engineering
基金
国家自然科学基金(50475044)
广东省自然科学基金项目(04300155)
广州市科技项目(2004Z3-D9021)
关键词
封装
扩晶
晶圆
结构
encapsulation
expanding
wafer
structure
