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氧气吸附对碳纳米管电子特性的影响 被引量：1

Effect of Oxygen Adsorption on Electronic Properties of Carbon Nanotubes
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摘要 碳纳米管暴露在空气中会引起其电子特性的改变.使用微电子工艺在硅衬底上制备出生长碳纳米管的阵列图形,使用热CVD法实现碳纳米管在硅平面上的定点生长.研究了不同温度下空气氛围对多壁碳纳米管电子特性的影响.实验结果表明,空气中的水分子和氧气都会影响碳纳米管的电子特性.在室温环境中,水分子对碳纳米管电子特性的影响起主要作用,随着环境温度的升高,氧气对碳纳米管电学性质的变化起主要作用. Electronic properties of carbon nanotubes are dramatically influenced by exposuring to air. Array configurations are defined by microelectronic fabrication technology. Carbon nanotubes are grown selectively in the predefined array configurations by thermal CVD. Effect of air environment on electronic properties of carbon nanotubes is investigated under different temperatures. The results show that the properties of carbon nanotubes are influenced by both water vapor and oxygen in air. Water vapor play a key...
作者 黄钦文 吴军 陈大鹏 陈永胜 叶甜春
机构地区 中国科学院微电子研究所 南开大学功能高分子材料教育部重点实验室
出处 《电子器件》 CAS 2007年第6期1981-1984,共4页 Chinese Journal of Electron Devices
基金 国家自然科学基金资助项目(60576053) 国家"863"计划资助项目(2005AA404210)
关键词 碳纳米管 吸附 氧化 气体传感器 化学气相淀积 carbon nanaotubes adsorption oxidation gas sensor CVD
分类号 TB381 [一般工业技术—材料科学与工程]
  • 相关文献

参考文献19

  • 1李昕,刘君华,朱长纯.基于碳纳米管薄膜的吸附式气体传感器的研究[J].中国科学（E辑）,2005,35(7):689-700. 被引量：4
  • 2[2]Zhang Y,Liu J H,Li X,et al.Study of Gas Sensor with Carbon Nanotube Film on the Substrate of Porous Silicon[C]//Proceeding of the IEEE International Vacuum Microelectronics Conference.IVMC,2001,13-14.
  • 3万步勇,王万录,廖克俊,吴子华,王永田,余鹏,孙鹏.多壁碳纳米管气敏性质的研究[J].真空科学与技术,2003,23(5):323-327. 被引量：13
  • 4郭淼,方向生,糜裕宏,张孝彬,陈裕泉.氯化铜掺杂的多壁碳纳米管对甲醛的气敏响应研究[J].传感技术学报,2006,19(4):953-956. 被引量：8
  • 5[5]Wong Y M,Kang W P,Davidson J L,A Novel Microelectronic Gas Sensor Utilizing Carbon Nanotubes for Hydrogen Gas Detection[J].Sensors and Actuators B 2003,93,327-332.
  • 6[6]Sayago I,Terrado E,Lafuente E,Hydrogen Sensors Based on Carbon Nanotubes Thin Films[J],Synthetic Metals 2005,148,15-19.
  • 7[7]Junya Suehiro,Guangbin Zhou,Hiroshi Imakiire,Controlled Fabrication of Carbon Nanotube NO2 Gas Sensor Using Dielectrophoretic Impedance Measurement[J].Sensors and Actuators B 2005,108,398-403.
  • 8[8]Valentini L,Cantalini C,Lozzi L,Effects of Oxygen Annealing on Cross Sensitivity of Carbon Nanotubes Thin Films for Gas Sensing Applications[J].Sensors and Actuators B 2004,100,33-40.
  • 9[9]Cantalini C,Valentinim L,Armentano I,An Innovative Approach to Gas Sensing Using Carbon Nanotubes Thin Films:Sensitivity,Selectivity and Stability Response Analysis[C]//Sensors,2003,Proceedings of IEEE.2003,1,424-427.
  • 10[10]Jang Yoon-Taek,Moon Seung-Il,Ahn Jin-Ho,A Simple Approach in Fabricating Chemical Sensor Using Laterally Grown Multi-Walled Carbon Nanotubes[J].Sensors and Actuators B,2004,118-122.

二级参考文献34

  • 1管振林,邢建平,郝丕柱,李建明,刘文利,裘南畹.气敏薄膜电导响应的扩散反应和传感理论（Ⅰ）基本理论[J].山东工业大学学报,1994,24(1):1-13. 被引量：5
  • 2陈金霞,郭淼,陈文菊,李昱,李婷,张孝彬,陈裕泉.基于多壁纳米碳管的传感器对甲苯的气敏性研究[J].传感技术学报,2005,18(1):39-42. 被引量：10
  • 3郝丕柱,邢建平,管振林,李建明,刘文利,裘南畹.气敏薄膜电导响应的扩散反应和传感理论（Ⅱ）──实验结果与讨论[J].山东工业大学学报,1995,25(1):8-17. 被引量：6
  • 4吴音,缪卫国,周和平.纳米碳管及相关材料的电性能[J].电子元件与材料,1997,16(1):9-12. 被引量：1
  • 5Zhang Y, Liu J H, Li X, et al. Study of gas sensor with carbon nanotube film on the substrate of porous silicon. Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC, 2001.13～14
  • 6Valentini L, Bavastrello V, Stura E, et al. Sensors for inorganic vapor detection based on carbon nanotubes and poly (o-anisidine) nanocomposite material. Chemical Physics Letters, 2004, 383:617～622
  • 7Cantalini C,Valentini L, Armentano I, et al. Sensitivity to NO2 and cross-sensitivity analysis to NH3,ethanol and humidity of carbon nanotubes thin film prepared by PECVD. Sensors and Actuators B, 2003,95:195～202
  • 8Valentini L, Lozzi L, Cantalini C, et al. Effects of oxygen annealing on gas sensing properties of carbon nanotube thin films. Thin Solid Films, 2003, 436:95～100
  • 9Peng S, Cho K, Qi P F, et al. Ab initio study of CNT NO2 gas sensor. Chemical Physics Letters, 2004, 387:271～276
  • 10Wienecke M, Bunescu M C, Pietrzak M, et al. PTFE membrane electrodes with increased sensitivity for gas sensor applications. Synthetic Metals, 2003, 138:165～171.

共引文献20

同被引文献8

  • 1Zhou Chongwu, Kong Jing, Yenilmez Erhan, Modulated Chemical Doping of Individual Carbon Nanotubes [J]. Science, 2000, 290, 1552-555.
  • 2Phaedon Avouris, Joerg Appenzeller, Richard Martel, Carbon Nanotube Electronics [J]. Proceedings of The IEEE, 2003, 91, NO. 11, 1772-1784.
  • 3Natalie O V Plank, Gavin A. Forrest, Rebecca Cheung, Electronic Properties of n-Type Carbon Nanotubes Prepared by CF4 Plasma Fluorination and Amino Functionalization[J]. J. Phys. Chem. B, 2005, 109,47,22096-22101.
  • 4Jing Kong, Chongwu Zhou, Ethan Yenilmez, Alkaline Metal- Doped n-Type Semiconducting Nanotubes as Quantum Dots [J]. Appl. Phys. Lett. , 2000,77,24,3977-3979.
  • 5Philip G, Collins, Keith Bradley, Extreme Oxygen Sensitivity of Electronic Properties of Carbon Nanotubes [J]. Science, 2000, 287, 1801-1804.
  • 6Seong Chu Lim, Chul Su Jo, Hee Jin Jeong, Effect of Oxidation on Electronic and Geometric Properties of Carbon Nanotubes[J]. Jpn. J. Appl. Phys , 2002, 41, 5635-5639.
  • 7Xiao Yan Zhu, Seung Mi Lee, Young Hee Lee, Adsorption and Desorption of an O2 Molecule on Carbon Nanotubes[J]. Physical Review Letters, 2000,85 (13):2757-2760.
  • 8Seung-Hoon Jhi, Steven G. Louie, Marvin L. Cohen, Electronic Properties of Oxidized Carbon Nanotubes[J]. Physical Review Letters, 2000,85, (8):1710-1713.

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电子器件
2007年 第6期

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