摘要
利用X射线双晶衍射方法,测定了分布布拉格反射镜(DBR)的衍射回摆曲线,除了DBR主衍射峰("0"级衍射峰)外,还观察到"1"级和"2"级卫星峰。"0"级双晶衍射峰的半高宽为12.36″,衬底GaAs的衍射峰半高宽为11.57″。"0"级衍射峰半高宽与衬底GaAs的衍射峰半高宽比较接近,表明晶格具有很高的完整性。由这些衍射峰之间的角距离,计算出了DBR的周期D及Al含量x值。X射线双晶衍射结果表明生长所得结构与设计相符合。
Analysis of DBR structure is made with X-ray double crystal diffraction. The structure parameters of DBR were obtained from the rocking curve. The first and second satellite peaks around the main("0" level) diffraction peak appear in the DBR rocking curve. The FWHM of diffraction peaks of "0" level and GaAs substrate are 12.36″ and 11.57″ respectively, which are quite close, showing much higher integrity of the crystal lattice. The DBR period D and Al concentration x have been obtained from the angle distan...
出处
《半导体光电》
CAS
CSCD
北大核心
2003年第6期412-414,共3页
Semiconductor Optoelectronics
关键词
分布布拉格反射
X射线双晶衍射
回摆曲线
卫星峰
distributed Bragg reflector（DBR）
X-ray double crystal diffraction
rocking curve
satellite peak
