摘要
文中演示了一种高分辨率的压阻检测式二氧化硅微悬臂梁传感器及其制作方法,并利用该传感器实现了对化学气体的检测.通过传感器在线检测以及其它表征手段,验证了该传感器通过单分子自组装方法获得敏感层的可行性.经过Cu2+/巯基十一酸单分子自组装层修饰的微悬臂梁传感器可以对甲基膦酸二甲酯(DMMP)气体进行快速响应,最小检测浓度可达数ppb(×10-9).
The paper presents an ultraresoluble piezoresistive silicon dioxide microcantilever chemical sensor, its fabrication and its application for chemical gas sensing. The on-line detections of the sensor combine with other characterizations shown that the chemical specific layers can be immobilized on the sensor successfully by the self-assembled monolayer. The gaseous dimethyl methylphosphonate(DMMP)can be detected with concentration decades ppb(×10-9) by the sensor modified with the Cu2+/11-mercaptoundecanoic acid specific layer.
出处
《传感技术学报》
CAS
CSCD
北大核心
2007年第10期2174-2177,共4页
Chinese Journal of Sensors and Actuators
基金
973项目资助(2006CB300405)
关键词
二氧化硅
微悬臂梁
压阻
传感器
silicon dioxide
microcantilever
piezoresistive
sensor
