摘要
研究了一种集高精度自准直仪与五棱镜于一体,采用角差法(角度变化量测试),实现大口径平面镜垂直状态下面形测试的方法.此方法的运用可实现对大口径平面镜面形的直接高精度检测,突破常规'以大测大'的高成本检测方法.本文阐述了测试装置的设计思想,对影响面形轮廓测试精度的因素进行了讨论.大口径平面镜面形的变化可通过其各点法线方向角度的变化量而反映出,采用高精度测试角度变化量的方法可计算获知面形轮廓状态.通过对大口经平面镜条带区域面形轮廓的测试原理分析,计算得出角差法(角度变化量测试)的测量不确定度.同时,由于对测试的高精度要求(纳米级),测试环境(温度、振动、气流扰动)也对测试结果有着不可忽视的影响,通过条带区域轮廓测试实验,对采样方式与环境影响进行了分析,从而得出在一定测试条件下,测量装置与环境对测量精度的影响程度,其测量不确定度可达到次纳米量级以上(扩展不确定度U=15.4～9.0 nm,取置信概率p＝0.99,包含因子κ＝3),基本满足测试需要.
The method of angle difference testing is used to evaluate the topography of high precision large flat mirror.The angle difference testing is the measurement of angle change.The topography of high precision large flat mirror would be evaluated by measuring angle change of normal every point on the mirror. The topography is directly tested and the measurement needs no external references.The cost is inexpensive.The testing technique is based on a combination of the ultra-precise autocollimator and the pentagon prism.The testing method for the topography of high precision large flat mirror in verticality is presented and the influences of measurement environment(temperature and vibration and current) is discussed.The testing result of the topography of the mirror in centre strip area is analysed.Within the given experiment condition the influences of measurement environment is discussed.The uncertainty of the testing result is 15.4~9.0 nm(p=0.99,κ=3).
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第z1期121-126,共6页
Optics and Precision Engineering
关键词
大口径平面镜
面形测试
角差法
高精度自准直仪
五棱镜
large flat mirror
topography measurement
method of angle difference testing
ultra-precise autocollimator
pentagon prism
