1[1]Rao Y J, Gnewuch H, Pannell C N. Electro-optic Electric Field Sensors Based on Periodically Poled LiNbO3. Electronics Letter, 1999,36 (7) : 596~ 597
2[2]Bohnert K, Brandle H,Frosido G. Field test of Interferometric Optical Fiber High-voltage and Current Sensors. SPIE, 1994, 2360:16~19
6[6]Horenstein M N, Stone P R. A Micro- aperture Electrostatic Field Mill Based on MEMS Technology. Journal of Electrostatics, 2001 (51 - 52): 515 ~521
7[7]Riehl P S, Scott K L, Muller R S. Electrostatic Charge and Field Sensors Based on Micromechanical Resonators. Journal of Microelectromecanical System,2003,12(5) :577~589
8[8]Enikov E T,Lazarov K. PCB-integrated Metallic Thermal Micro- actuators. Sensors and Actuators,2003,105 : 76~82
9[9]Sinclair M J. A High Force Low Area MEMS Thermal Actuator. Inter Society Conference on Thermal Phenomena, Las Vegas, 2000
10[10]Koester D,Cowen A,Mahadevan R, et al. Polymumps Design Handbook. http://www. memscap. com/memsrus/svcsrule. html
5Peng Chun-rong,Chen Xian-Xiang,Ye Chao,et al.Design and Testing of a Micromechanical Resonant Electrostatic Field Sensor.J Micromech Microeng,2006(16):914-919.
6Chang-Jin Kim,John Y Kim I,Balaji Sridharan.Comparative Evaluation of Drying Techniques for Surface Micromachining.Sensors and Actuators A,1998(64):17-26.
7Junyong Feng,Guo Hua Xu,Yue An,et el.Construction of The Homogeneously Mixed SAM Composed of Octyltriethoxysilane and Octadecyltrichlorosilane by Taking Advantage of the Molecular Steric Restriction.Colloids and Surfaces A:Physicochem Eng Aspects,2008(316):194-201.
8S Mubassar Ali,Jeffrey M Jennings,Leslie M Phinney.Temperature Dependence for In-Use Stiction of Polycrystalline Silicon MEMS Cantilevers.Sensors and Actuators A,2004(113):60-70.
9Sneha A Kulkarni,Satishchandra B Ogale,Kunjukrishanan P vijayamohanan.Tuning the Hydrophobic Properties of Silica Particles By Surface Silanization Using Mixed Self-Assembled Monolayers.Journal of Colloid and Interface Science,200s(318):72-379.
10T Knieling,W Lang,W Benecke.Gas Phase Hydrophobisation of MEMS Silicon Structures with Self-Assembling Monolayers for Svoiding In-Use Sticking.Sensors and Actuators B,2007(126):13-17.