摘要
在电子束轰击炉中,加速电源采用六相十二脉波全波整流和开环控制,电子束流、聚焦电流和偏扫电流自动伺服加速电压变化的新控制策略。这样在运行过程中,即使加速电压波动较大,电子束功率、聚焦位置和偏扫角的变化被有效地控制在工程允许范围内。这种新的控制策略避免了大功率加速电源采用晶闸管移相交流调压时所带来的电网谐波污染大、功率因数低、主变压器余量大且效率低下等问题。此外,采用该控制策略后,加速电压纹波系数更低,提高了电子枪中电子束的流通率。
A novel control technique has been successfully developed for the high power electron beam bombardment furnace,in which 6-phase,12-pulse,full wave,and open-loop control were employed for the accelerating power supply(APS).Moreover,the electron beam current,focusing current,deflection and scanning current can be automatically controlled in the APS.Therefore,the variations in the electron beam power,focal length,and the deflection angle can be limited within a permissible range even when a fairly large fluctu...
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2008年第2期148-152,共5页
Chinese Journal of Vacuum Science and Technology
关键词
电子束轰击炉
加速电源
电子光路电源
控制策略
Electron beam bombarding furnace
Accelerating power supply
Electron optical power supply
Control strategy
