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压电传感器材料的铁电特性研究 被引量:2

Investigation of ferroelectric properties of piezoelectric sensor
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摘要 本文采用溶胶-凝胶工艺制备了不同Mn离子掺杂浓度的PZT薄膜。研究了不同掺杂浓度对压电传感器薄膜铁电特性的影响。试验结果表明:当Mn离子含量较少时,Mn在PZT中主要表现施主掺杂特性,薄膜铁电性能提高;而当浓度增大时,薄膜性能降低。 PZT films with 0~1.3mol% Mn dopant were fabricated using sol-gel method.The effect of manganese doping on ferroelectric properties of PZT(Zr/Ti=30/70) thin films was investigated.Mn ion is preferentially acted as donor when the concentration of Mn is small,which can improve the ferroelectric properties of PZT films.
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2006年第z1期302-303,共2页 Chinese Journal of Scientific Instrument
基金 国家自然科学基金(90207003)资助项目
关键词 压电材料 PZT 铁电性 MN piezoelectric PZT ferroelectric Mn
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