摘要
微位移技术是精密机械与仪器的关键技术之一。本文介绍精密定位系统中的典型微位移机构,分析常用机构的特点及存在问题,并以平行板柔性铰链为基础,通过对其结构的优化,设计应用于扫描探针系统的二维定位工作台,并利用有限元方法对该工作台静态特性进行了仿真分析。
Typical micro displacement structures are presented in this paper, with characteristics and problems of each analyzed. Furthermore, a 2-D displacement structure was developed based on the parallel leaf spring structure, which is supposed to be applied in a precision positioner for scanning probe system. The static characteristics of this structure was analyzed with finite element method.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第z2期1435-1436,共2页
Chinese Journal of Scientific Instrument
基金
"973"计划资助项目(2003CB716201)
关键词
微位移
柔性铰链
有限元方法
平行板
micro displacement flexure finite element method leaf spring
