摘要
大型工件内外径测量点的瞄准和定位是大直径测量中的一个关键技术,也是国内外未能很好解决的测量问题。采用激光准直仪出射的高稳定光线瞄准和定位吸附在被测工件直径两端点上的两个磁性定位块上的光电接收器,同时使用双频激光干涉仪直接测量出这两个光电接收器中心间的距离,通过几何计算得到被测直径大小。实验表明,该方法测量精度较高,测量系统的相对误差小于5×10-6。
The aiming and positioning of measured points in diameter measurement of a large-scale workpiece is a key technology. It is a difficult measurement problem, which has not been solved. A new method of aiming and positioning the measured point of a large diameter by a laser beam is adopted. In the method, the distance between centers of two-quadrant silicon, hotodiades on the chucks can be measured by a dual frequency laser interferometer. The dimension of the measured diameter can be calculated by a simple equation. The experiment results show that the relative measurement error is less than 5×10-6.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第z1期47-48,共2页
Chinese Journal of Scientific Instrument
关键词
激光准直
激光干涉
直径测量
定位
Laser collimation Laser-interferometer Diameter measurement Positioning
