摘要
微弱输出信号的检测技术是微机械陀螺研制中的关键技术之一。提出了一种适用于电容检测型微机械陀螺的信号检测电路并分析了其对噪声的抑制能力。此电路用积分电路检测微小电容变化量,并进一步采用开关相敏解调电路对信号全波检测,能检测到aF量级的电容变化,可以实现陀螺0.05°/s的分辨率。
The detecting method for weak output signals is one of the key techniques in making micromachinedgyroscope.A circuit used for detecting the signal of the micromachined gyroscope with capacitive detection is pre-sented, and its capability of restraining noise is also analyzed.In this circuit,an integrator is used to detect theweak variety of the capacitance,a phase sensitive detector is used to demodulate the signal.This circuit,whichcan measure the variety of the capacitance up to aF level,is able to satisfy the requirement of the 0.05°/s distin-guish rate.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第z2期324-326,共3页
Chinese Journal of Scientific Instrument
关键词
微机械陀螺
积分器
相敏解调
噪声
Micromachined gyroscope Integrator Phase sensitive demodulation Noise
