摘要
研制了一种采用修正环在线修整抛光盘技术及专家数据库系统控制的智能型纳米级超精密抛光机,用于超精密平面抛光。文中介绍了其设计原理、运动模式、专家控制系统的设计与实现,加工结果表明,该型抛光机可将加工余量去除误差控制在1nm 以下,并获得表面粗糙度小于0.2nm 的平面。
An Ultra-precision Polishing Machine is developed,with conditioning ring to condition polishing pad in situ,and expert data base controlling system is applied,which can rectify the surface roughness of the workpiece up to Nanometer Level.This paper discusses the design principle,motion pattern and intelligent controlling system of the polishing machine.The investigation of processing results by the ultra-precision polishing machine shows the removal error of process redundancy is smaller than l nm,and the s...
基金
浙江省自然科学基金青年科技人才培养基金(RC02066)
浙江省科技厅重点项目(2003C21036)
宁波市科技计划项目(2002A41017)资助
关键词
抛光
修正环
专家数据库
纳米
智能
polishing
conditioning ring
expert data base
nanometer
intelligence
