摘要
采用固相反应法制备适用于红外探测器的高Tc超导靶材(YBCO),直径100mm,性能为:Tc≥90K,d≥4.5g·cm-3,平整度≤0.5mm,平面度≤0.1mm,无分层和裂纹;通过直流磁控溅射制得YBCO/YSZ超导薄膜,其性能为:Tc≥90K,Jc(77K)>106A·cm-2,ΔT<3K;以高Tc超导薄膜为灵敏元的十二元测辐射热计的技术指标为:响应波段1～3000μm,平均响应率R(500,12,1)>104V·W-1,平均噪声等效功率NEP<10-12W·Hz-1/2,平均探测率D (500,12,1)>2×109cm·Hz·1/2·W-1,完成了对红外、亚毫米波和3mm波成像的初步实验。
The high Tc superconducting YBCO target material applied to IR detector was prepared through solid phase reaction. Its diameter is 100 mm, its properties are: Tc≥90 K, d≥4.5 g·cm-3, smoothness≤0.5 mm, laneness≤0.1 mm, and there are not split layers and crackles in it. The superconducting YBCO/YSZ thin film is prepared through DC magnetic sputtering, which has these properties:Tc≥90K, Jc(77 K)＞106 A·cm-2, ΔT＜3 K. The 12 sensing elements bolometer applied high Tc superconducting YBCO thin films has these properties:responsive waveband 1～3000 μm, average responsivity R(500,12,1)＞104 V·W-1, average noise equivalent power NEP＜10-12 W·Hz-1/2, average detectivity D*(500,12,1)＞2×109 cm·Hz1/2·W-1. Tentative experiment on image formation to IR ray, submillimeter wave and 3 millimeter wave is realized.
出处
《中国稀土学报》
CAS
CSCD
北大核心
2002年第z2期101-103,共3页
Journal of the Chinese Society of Rare Earths
基金
总装备部(CL 9617 1)资助项目
