摘要
用溶胶-凝胶法在Pt/Ti/SiO2/Si(100)基片上沉积Ba0.6Sr0.4TiO3薄膜,采用SEM、XRD、AFM分析薄膜的表面形貌和结晶行为。为抑制薄膜裂纹,在前驱体溶液中加入高分子聚合物聚乙烯吡咯烷酮(PVP)。结果表明,经700℃退火1h,得到表面平整、致密、无裂纹和孔洞以及晶粒取向高度一致的薄膜。薄膜钙钛矿结构明显,并随温度的升高而趋于完善。在结晶初期形成规则的柱状晶粒在长大和吞并的过程中逐渐形成颗粒状晶粒。薄膜的晶粒大小和表面粗糙度随退火温度的升高而增大。在平均晶粒较大且晶界分明的情况下,薄膜的均方根粗糙度仍能保持在7.854nm左右。
Ba0.6Sr0.4TiO3 (BST) thin films were fabricated on Pt/Ti/SiO2/Si (100) substrates by sol-gel method. The surface morphology and crystallization behavior were observed by SEM, XRD and AFM. In order to avoid crack, polyvinyl pyrrolidone (PVP) was dispersed uniformly into the sol-gel precursor solution. It is revealed that the BST films annealed at 700℃ for 1 h exhibit a pure perovskite phase and are homogeneous, compact, smooth and crack free. The grain size and surface roughness of BST thin films become larg...
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
2008年第S1期44-46,共3页
Journal of University of Electronic Science and Technology of China
基金
部级预研项目(914A1003.606DZ02)
关键词
钛酸锶钡薄膜
晶化行为
聚乙烯吡咯烷酮
溶胶-凝胶法
barium strontium titanate （BST） film
crystallization behavior
polyvinyl pyrrolidone
sol-gel method
