摘要
为了实现在光纤环衰荡腔(FLRD)系统中的微量气体液体传感,提出了利用飞秒激光微纳加工的方法加工微流体传感装置。利用800 nm的飞秒激光脉冲在普通980 nm,1550 nm的单模光纤上实现了直写光学微腔,微腔的宽度达到4μm,深度80μm。将在单模光纤刻蚀的光学微腔成功应用于光纤环衰荡腔系统之中。针对光纤环衰荡腔的系统装置,分析了该系统的探测原理,并对该系统应用于微流体吸收探测中所探测的衰荡时间、损耗及待测流体浓度的关系进行理论推导。利用此系统,实现了对微量流体浓度的吸收谱高灵敏度探测。
In order to realize the sensing probe of micro-scale liquid and gas in fiber cavity ring-down spectroscopy system, a new method of fabricating microfluidic sensing devices is proposed. The micro-cavity on single mode 980 nm and 1550 nm fibers by direct writing is achieved with a focused near-IR 800 nm femtosecond laser beam. The width of the cavity is 4 μm, with the depth of 80 μm. The micro cavity directly written by femtosecond laser is successfully applied into fiber-loop ring-down (FLRD) spectroscopy, and its detection principle is analyzed. It is used in micro-cavity liquid absorb detection, and the relation between the detected ring-down time, the loss and the liquid concentration is deduced. With this micro-cavity, FLRD spectroscopy can realize gas and fluidic absorption measurement on micro-scale.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2009年第3期713-717,共5页
Chinese Journal of Lasers
基金
国家自然科学基金(10674075,60577018)资助课题
关键词
传感器
光学微腔
飞秒激光
光纤环衰荡腔光谱
Fibers
Gas absorption
Lasers
Liquids
Microcavities
Optical sensors
Pulsed laser applications
Ultrashort pulses
