期刊文献+

SPM数据可视化技术研究

Research of SPM Data Visualization
下载PDF
导出
摘要 介绍了一套基于数字图像处理技术和OpenGL技术的数据可视化方案。该方案可以用于各种类型的SPM仪器的二维和三维成像处理。针对SPM应用首次提出了“高度剔除”去噪算法以及“水平线最小二乘调整”高度再调整算法,实验表明,这些算法对于增强高度数据成像对比度以及降低从高度数据到图像映射造成的细节损失可以起到有效的作用。详细地讨论了三维成像中的关键问题———顶点颜色的计算,并通过OpenGL的纹理映射技术获得了逼真的三维形貌图。另外,该套可视化方案数据流明确,可视化效果好,可以为其它类型的数据可视化提供有益的参考。 A scheme of data visualization based on digital image processing and OpenGL technology is introduced, which can be used in the two-dimensional or three-dimensional imaging process of SPM instruments. A new de-noising algorithm - height elimination and a height-readjustment algorithm - horizontal least squares estimate adjustment are firstly proposed for the special application of SPM data processing. Experimental results show that these algorithms play effective roles of improving the contrast of the image mapped from height data and decreasing the loss of details caused by the mapping process. Also, the calculation of the color of the vertexes which is the key point of three-dimensional visualization is discussed in detail and the realistic topographies of some samples are obtained using the texture mapping technology of OpenGL. In addition, this scheme of data visualization has clear data flow to result in excellent visualization effect, so it could be a helpful reference for data visualization of other types.
出处 《微细加工技术》 EI 2006年第5期8-12,共5页 Microfabrication Technology
基金 国家自然科学基金资助项目(10427401)
关键词 SPM 数据可视化 数字图像处理 计算机图形学 OPENGL SPM data visualization digital image processing computer graphics OpenGL
  • 相关文献

参考文献6

  • 1陈成钧 华中一 等.扫描隧道显微学引论[M].北京:中国轻工业出版社,1996..
  • 2[2]Pingali G S,Jain R.Estimation of sample and probe tilts in scanning probe microscopy[J].Instrumentation and Measurement Technology Conference[C].Italy:IEEE,1993.327-332.
  • 3[3]Mainsah E,Greenwood J A,Chetynd D G.Metrology and Properties of Engineering Surfaces[M].Germany:Sringer-Verlag,2001.203-211.
  • 4黄文浩,陈宇航,党学明.基于SPM技术的表面纳米计量[J].微纳电子技术,2004,41(1):1-9. 被引量:1
  • 5章毓晋.图像工程(上册).图像处理和分析[M].北京:清华大学出版社,1999..
  • 6[6]Richard S,Wright Jr,Benjamin Lipchak.OpenGL 超级宝典(第三版)[M].北京:人民邮电出版社,2005.

二级参考文献51

  • 1[1]TEAGUE E C. J Vac Sci Technol, 1989, B 7: 1898.
  • 2[2]KIELY J D, BONNELL D A. J Vac Sci Technol, 1997, B 15: 1483.
  • 3[3]REN N, LEE S C. Journal of Tribology, 1993, 115: 597.
  • 4[4]TIAN X, BHUSHAN B. Journal of Tribology, 1996, 118: 33.
  • 5[5]POLONSKY I A, KEER L M. Wear, 1999, 231: 206.
  • 6[6]WANG Q Q, CHEN Y H, HUANG W H. Proc.lnternational Symposium on Precision Mechanical Measurements, 2002, 4:409.
  • 7[7]WANG W W, HU Q, WU X H, et al. Proceedings of 1998 China-Japan Bilateral Symposuim On Advanced Manufacturing Engineering, 1998, 145.
  • 8[8]YUROV V Y, KLIMOV A N. Rev Sci Instrum, 1994, 65:1551.
  • 9[9]STAUB R, ALLIATA D, NICOLINI C. Rev Sci-Instrum,1995, 66: 2513.
  • 10[10]WOODWARD J T, SCHWARTZ D K. J Vac Sci Technol,1998, B16: 51.

共引文献46

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部