摘要
文章介绍了超高真空设备放气的理论,并给出两种放气模型:Schram吸附模型和吸附-扩散模型;对设备的放气理论值进行了计算,并通过四极质谱仪得出的残余气体质谱图分析出材料放气的成分。
This paper discusses the outgassing theory and two outgassing models of materials, that is, Schram adsorption model and the adsorption-diffusion model based on Malev’s theory. The values of outgassing are calculated and outgassing of materials is analyzed by the residual gas spectrum obtained from quadrupole mass spectrometer (QMS) .
出处
《航天器环境工程》
2009年第2期158-161,共4页
Spacecraft Environment Engineering
关键词
放气
超高真空
材料
outgassing
ultra-high vacuum
material
