摘要
研究了三氯化铁蚀刻液对铁镍合金的蚀刻能力,通过对比实验,得出三氯化铁蚀刻液的最佳刻蚀温度为40℃,40℃时,20 mL蚀刻液的最大蚀刻速度为0.021 mg·min-1·mm-2;达到有效蚀刻量46.39 g/L时,蚀刻速度为0.009 4 mg·min-1·mm-2;达到最大蚀刻量58.79 g/L时,蚀刻速度为0.002 46mg·min-1·mm-2。
The etching ability of ferric chloride etching solution for iron nickel alloy was studied.The experiment results show that the best etching temperature of ferric chloride etching solution is 40 ℃.At 40 ℃,maximum etching speed of 20mL etching solution is 0.021 mg?min-1?mm-2;while achieving effective etching volume 46.39 g/L,the etching speed is 0.0094 mg?min-1?mm-2;while achieving the maximum etching volume 58.79 g/L,the etching speed is 0.00246 mg?min-1?mm-2.
出处
《辽宁化工》
CAS
2012年第12期1248-1249,1265,共3页
Liaoning Chemical Industry
关键词
三氯化铁蚀刻液
蚀刻
蚀刻能力
ferric chloride etching solution
etching
etching ability