摘要
利用溶胶-凝胶技术与电子束蒸镀相结合的方法在常温下制备了叠层V2O5/Ag/V2O5(VAV)透明导电薄膜,研究了各层薄膜厚度对叠层结构光电特性的影响.用原子力显微镜、紫外-可见光分光光度计、四探针电阻仪及开尔文探针对样品的表面形貌、光电性能及功函数等性质进行了表征.实验结果表明,该薄膜具有良好的光学和电学性质,可见光(380 ～ 780 nm)平均透过率达75％,迁移率为16.89 cm2/(V·s),载流子浓度为-1.043×1022 cm-3,方块电阻值为15.1 Ω/□,功函数为5.17 eV.该制备方法降低了V2O5薄膜的工艺制备难度,为该材料在太阳能电池中的应用创造了良好的前期基础.
V2O5/Ag/V2O5 (VAV) multi-layer transparent conductive film was prepared by the combination of sol-gel technique and electron beam evaporation at room temperature. The effects of each layer's thickness on photoelectrical properties and surface appearance of multi-layers were studied by atomic force microscope, UV-Vis spectrophotometer, four-point probe method and Kelvin probe. The experiments results reveal that the multi-layer transparent conductive film has desirable photo-electrical properties with average transmission of 75%(380~780 nm), mobility of 16.89 cm2/(V·s), carrier concentration of -1.043×1022 cm-3, the sheet resistance of 15.1 Ω/, and work function of 5.17 eV. This method reduces the difficulty of fabricating V2O5/Ag/V2O5 multi-layer films, providing a kind of promising transparent electrode for solar cells.
出处
《发光学报》
EI
CAS
CSCD
北大核心
2014年第3期360-365,共6页
Chinese Journal of Luminescence
基金
国家自然科学基金(61106057)资助项目
