摘要
为了研究电介质材料在微纳米尺度下表面电荷产生的原因,为纳米电介质材料的发展提供实验分析基础,本文利用电场力显微镜(Electrostatic Force Microscope,EFM)在微纳米尺度下对聚酰亚胺薄膜表面电荷的起因及特性进行了研究。研究表明:采用导电探针施加偏置电压,摩擦接触聚酰亚胺薄膜表面,在微纳米区域内可产生稳定的电荷分布;薄膜的接触电势差约为-4.0V;负电压更易在聚酰亚胺表面注入电荷;针尖运动速度对聚酰亚胺表面电荷的产生影响并不显著。
To provide theoretical and experimental basis for the causes of surface charge of nanodielectric material in micro/nano scale,an investigation of appearance and property of the surface charge of polyimide(PI)film was carried out through electrostatic force microscope(EFM)in the micro zone.Results have shown that charges could be injected on the surface of polyimide film under micro scale by frictional contact surface of material with conducting probe applied bias voltage.Contact potential difference of film was about-4.0V.Negative voltage injected more charge than positive one on the film.Tip speed and charge quantity relationship was not significant.
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2014年第3期452-455,共4页
Journal of Materials Science and Engineering
基金
国家自然科学基金资助项目(51307037)
黑龙江省自然科学基金资助项目(QC2013C042
E201220)
关键词
电场力显微镜
表面电荷
聚酰亚胺
接触电势差
electrostatic force microscope
surface charges
polyimide
contact potential difference
