摘要
为了降低PET瓶的透氧率,采用射频等离子体化学气相沉积(RF-PECVD)技术,以C_2H_2为碳源,Ar为稀释气体,在PET瓶内制备类金刚石(Diamond-like Carbon,简称DLC)薄膜作为阻隔层。采用傅里叶红外透射光谱(FTIR)、扫描电子显微镜(SEM)、原子力显微镜(AFM)和透氧测试(OTR)等手段对其进行结构、成分、形貌和阻隔性进行分析测试。结果表明,碳氢膜主要由sp^3杂化的碳氢化合物组成,薄膜阻氧性与sp^3杂化的碳氢化合物含量、膜厚和薄膜表面形貌有关。特别是采用增强(capacitively coupled plasma,CCP和inductively coupled plasma,ICP)放电等离子体源制备的类金刚石膜表面致密,均匀无裂纹,阻隔性明显提高。
The diamond-like carbon(DLC) films were grown RF plasma enhaneed chemical vapor deposition (PECVD)on the inner walls of the polythylene terephthalate(PET) bottle to improve its gas barrier property.The microstructures, composition and barrier properties of the DLC films were characterized with Fourier transform infrared spectroscopy (FTIR),scanning electron microscopy(SEM),atomic force microscopy(AFM)and oxygen transmission rate(OTR) measurement.The results show that carbon and hydrogen bonded by sp^3 hybrid orbital dominate in the DLC films;and that three factors,including the sp^3 bond density,film thickness and its morphology,strongly affect the barrier properties of the PET bottles.Interesting finding is that the CCP and ICP enhanced source produces more compact,more homogenous and crack-free DLC films,beneficial to gas barrier property.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第S1期59-63,共5页
Chinese Journal of Vacuum Science and Technology
