摘要
Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patterns are produced by the superposition of two high frequency gratings through a microscope system. Compared with other grating-based photo-mechanics methods, microscopic moire method could provide whole-field moire patterns of both high spatial resolution and high sensitivity. The frequency of specimen and reference gratings used in this method can be from 1 line/mm to 10000 lines/mm. Additionally, a 4F optical filter system is used to enhance the contrast of microscopic moire patterns effectively.
Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patterns are produced by the superposition of two high frequency gratings through a microscope system. Compared with other grating-based photo-mechanics methods, microscopic moire method could provide whole-field moire patterns of both high spatial resolution and high sensitivity. The frequency of specimen and reference gratings used in this method can be from 1 line/mm to 10000 lines/mm. Additionally, a 4F optical filter system is used to enhance the contrast of microscopic moire patterns effectively.
基金
The project supported by the National Natural Science Foundation of China
