摘要
Scanning electron acoustic microscopy (SEAM) is a new technique for imasing and characterization ofthermal, elastic and pyroelectric property variations on a microscale resolution. The signal generation mechanisms and the application of scanning electron acoustic microscopy in GalnAsSb alloy grown by MOCVD wereinvestigated. Defects below the surface of GalnAsSb alloy were found by SEAM images and cathodelumi-nescence. The results show that electronacoustic imaging has its own features over secondary electron imag-ing.
Scanning electron acoustic microscopy (SEAM) is a new technique for imasing and characterization ofthermal, elastic and pyroelectric property variations on a microscale resolution. The signal generation mechanisms and the application of scanning electron acoustic microscopy in GalnAsSb alloy grown by MOCVD wereinvestigated. Defects below the surface of GalnAsSb alloy were found by SEAM images and cathodelumi-nescence. The results show that electronacoustic imaging has its own features over secondary electron imag-ing.
