摘要
制备了多孔阳极氧化铝,利用原子层淀积技术对其封孔,借助场发射扫描电镜(SEM)分析了样品的表面及剖面形貌,对样品进行染色处理,利用酸性点滴试验测试样品抗腐蚀性能。结果表明:阳极氧化处理形成大孔径约为16 nm的多孔膜,多孔膜在循环50次的原子层淀积下能实现表面封孔而内部有空结构;经封孔后的样品抗染色及抗腐蚀能力增强。
The porous anodic aluminum oxide membranes were prepared by anodic oxidation,and then sealed by atomic layer deposition process.The surface and cross-section images were tested by SEM.The ability to resist dyeing and corrosion of the samples was measured.The porous anodic aluminum oxide samples of which the pore size was about 16 nm could be sealed by about 50 cycles of atomic layer deposition.The sealed sample had holes under the surface.The sealed sample had better alility to resist dyeing and corrosion.
出处
《材料保护》
CAS
CSCD
北大核心
2013年第S1期24-26,共3页
Materials Protection
关键词
阳极氧化铝
原子层淀积封孔
氧化铝
anodic aluminum oxide membranes
atomic layer deposition sealing
Al2O3
