摘要
基于多样品多型号仪器的测试信息及其GUM和MCM方法,讨论了四步干涉法测量红外光学材料折射率均匀性的测量范围及其测量不确定度评定。红外干涉测量的绝对灵敏度和准确度虽不及可见激光干涉仪,但采用了四步干涉测量的方法,消除了干涉仪的固有系统误差,有利于实现对红外光学材料折射率均匀性的高准确度测量。实际测试表明,该测量范围覆盖1×10-5~5×10-3,测量相对标准不确定度为2×10-1~2×10-2。
Based on the test information from multi‐sample and multi‐mode instrument ,as well as the guide to expression of uncertainty in measurement (GUM ) and Monte Carlo method (MCM ) ,the four‐step interferometry measurement range and uncertainty of the infrared optic materials refractive index uniformity were discussed .Although the absolute sensitivity and ac‐curacy of infrared interferometry are lower than that of visible laser interferometer ,the four‐step interferometry can eliminate the inherent systematic errors of the interferometer and can help achieve high‐accuracy measurements of infrared optical refractive index homogeneity .The practical tests show that the measurement range can reach 1 × 10-5 ~5 × 10-3 and the relative standard uncertainty can reach 2 × 10-1 ~2 × 10-2 .
出处
《应用光学》
CAS
CSCD
北大核心
2015年第1期82-87,共6页
Journal of Applied Optics
