摘要
Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics, the off-axis reflective optics is the most hopeful solution to the ever-highest demands of these applications. This paper gives the requirements of both the above mentioned applications and the similarities and differences between these two kinds of optical systems. Finally, a design example of off-axis reflective optics with wide field of view is presented and described.
Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics, the off-axis reflective optics is the most hopeful solution to the ever-highest demands of these applications. This paper gives the requirements of both the above mentioned applications and the similarities and differences between these two kinds of optical systems. Finally, a design example of off-axis reflective optics with wide field of view is presented and described.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第5期483-486,共4页
Optics and Precision Engineering
