摘要
介绍了新建成的一台核探针的构造。它的主要特点是:采用长焦距四极透镜、以综合分析为目标的多探测器系统、快速随机扫描、多参量事件方式数据获取、全定量扫描分析(TQSA)方式处理数据等。这些特点使这台核探针成为医学生物、冶金、微电子、考古和地球科学等领域中十分有用的工具。文章用一些例子佐证了它广泛的应用前景。
The Shanghai Nuclear Microprobe features itself with long focus quadrupole lenses, multi-detector system for complex measurements, fast random scan, event by event data collection and TQSA data reduction, which make the microprobe an ideal tool for microanalysis in the fields of medicine, biology, metallurgy. microelec-tronics, archaeology and earth sciences. Its potentiality has been demonstrated with some examples of applica-tion in the fields.
出处
《电子显微学报》
CAS
CSCD
1993年第3期291-295,共5页
Journal of Chinese Electron Microscopy Society
