摘要
论述了CVD金刚石薄膜基体材料的性质 ,给出了选择金刚石薄膜基体材料的方法 ,并对各种材料的膜基结合力情况作了简要评述。
The properties of CVD diamond film substrates were introduced. The methods of selecting diamond film substrates were provided, and the adhension conditions between diamond film and the substrates were summarized as well.
出处
《金刚石与磨料磨具工程》
CAS
2004年第3期50-51,共2页
Diamond & Abrasives Engineering