摘要
在热丝 CVD装置中 ,以氢气、丙酮、硼酸三甲脂为原料 ,在 YG6上制备了含硼金刚石薄膜 .研究丙酮中硼含量对薄膜表面晶形及晶粒度的影响 .结果表明 ,薄膜中渗入适量的硼不改变薄膜表面晶形 ,细化晶粒 .有利于薄膜附着力的提高 ;而过高的硼含量恶化金刚石薄膜质量 。
In this article we report preliminary results of the boron concentration variation on the surface morphology, quality and adhesion of diamond films deposited on WC-Co substrates. Hydrogen, acetone and B(CH_3)_3 were used as reactive materials. The results have shown that the crystal size decreased and the adhesion of diamond coatings increased with moderate boron concentration, but the crystal morphology did not change obviously. With the addition excessive of boron, the quality of the grown diamond films decreased and the adhesion of diamond films were also decreased.
出处
《武汉化工学院学报》
2004年第3期51-53,共3页
Journal of Wuhan Institute of Chemical Technology
基金
湖北省科技攻关计划 ( 2 0 0 2 AA1 0 5 A0 2)
