摘要
结合一种用于大孔同轴度测量的激光准直系统,分析高斯光斑能量中心坐标的几种常用计算方法:对称法、曲线拟合法和重心法。准直系统用单模尾纤半导体激光器作光源,用CCD探测器接收激光光斑。重心法计算时该实验装置实验室内6m距离上的方向稳定性达到1 5×10-6的量级。实验表明重心法有效利用光斑全场数据,对光强分布缺陷不敏感,分辨率和示值重复性都优于对称法和曲线拟合法。
The methods such as symmetry method, curve-fit method and bary center method for calculating the center position of Gaussian beam spot of a laser alignment system, constructed for measuring coaxiality error of large holes and composed of a CCD detector as beam receiver and a single-mode pigtailed laser diode as light source, are analyzed contrastively. Calculating through bary center method, which utilizes all data of beam spot effectively and is insensitive to the imperfection of energy distribution, direction stability of this alignment system achieves 1.5×10^(-6) within 6M in lab. It is proved by experiment that resolution and indication repeatability of bary center method are better than those of symmetry method and curve-fit method.
出处
《计算机测量与控制》
CSCD
2004年第5期486-488,共3页
Computer Measurement &Control
基金
中国机械工业技术发展基金项目"大型机械零部件同轴度测量技术研究"(97JA0211)
北京市重点实验室开放基金项目"高精度半导体激光准直系统"。
