摘要
采用传统的熔体冷却方法,研究以TiO2和ZrO2为成核剂,以含Na2O的Li2O-Al2O3-SiO2系统微晶玻璃为基础组成,通过二步法热处理制度制备出符合微电子机械系统静电键合要求的微晶玻璃材料。利用X射线衍射XRD、透射电镜(TEM)、高分辨率透射电镜(HREM)、能谱(EDS)等技术对微晶玻璃的物相组成和显微结构进行了分析;研究了热处理制度对微晶玻璃的热膨胀系数和电阻率的影响。结果表明:热处理后,基础玻璃发生的结构变化是微晶玻璃膨胀系数和电阻率下降的主要原因。
The glass-ceramic in Li2O-Al2O3-SiO2 system including Na2O with TiO2 and ZrO2 as nucleation agents, which was used to anodic bond in MEMS, was p roduced by the way of conventional melt quenching technology and two-step heat-t reatment. By the way of XRD, TEM, HREM, EDS, SKD and so on, the physics-phase co mpose and microstructure of the glass-ceramic were researched. The influence of heat-treatment method to the thermal expansion coefficients and resistivity was also studied. The results show that the structure changes of the glass contribut ed to the decline of thermal expansion coefficients and resistivity.
出处
《中国建材科技》
2004年第3期26-30,共5页
China Building Materials Science & Technology
