摘要
MEMS技术作为一门新兴的技术,越来越受到世界各国的重视。文中主要阐述了MEMS的研制背景、加工工艺、现状和发展趋势,并对MEMS技术面临的问题进行了简要分析。
MEMS(Micro Electro Mechanical Systems)technology is an emerging technology. It is taken more and more seriously both inside and outside the country. In this paper, background, processing technique and developing status of MEMS are introduced summarily. Trend is analyzed. Then the problems of MEMS are concisely reviewed.
出处
《机械工程师》
2004年第7期13-16,共4页
Mechanical Engineer
