摘要
镱材料具有压阻特性,其压阻系数比锰铜、碳等压阻材料要高得多。本文介绍了利用这一特性设计制作的箔式镱大压力传感器,并介绍了其工作原理和设计制作中的关键要点,以及在工艺上需解决的关键问题。
The ytterbium material has piezoresistive effect, whose piezoresistive coefficient is higher than that of manganin or carbon. Based on this characteristic , a Yb-foil pressure sensor for high pressure measurement is designed. The working principle , the key points during design ,and the key problems needed to be resolved in processing are introduced in this paper.
出处
《传感器世界》
2004年第7期19-21,18,共4页
Sensor World
关键词
镱箔
压阻特性
压力
传感器
工艺
ytterbium foil
piezoresistive effect
pressure sensor
fabrication
