摘要
本文描述了聚焦光束的莫尔偏折技术的三个重要应用:1)测量离焦量和试验物体表面的显微分析;2)测量平板玻璃的厚度;3)测量凹面或凸面物体的曲率半径。该方法设备简单,灵敏度可调节。
In the paper three important applications of Moire deflectometry of a focusingbeam are described: (1) measuring amount of defocusing and microscopic analysis for reflect-ing test surface; (2) thickness analusis of plate glass; (3) determining the curvature radiusof concave or convex object. The experimental setup for this method is simple and the sensi-tivity can be easily tuned.
出处
《光电工程》
CAS
CSCD
1993年第4期36-40,共5页
Opto-Electronic Engineering
关键词
光学参数测量
莫尔偏折技术
离焦量
Optical parameter measurement, Moire deflectometry, Defocus, Thickness measurement, Curvature measurement.
