摘要
阐述了利用激光差外干涉法,检查光栅尺准确度的原理,并介绍了根据这一原理而研制成的“光栅动态测量仪”的特点。该仪器在2.2m范围内的测量准确度为±1.5μm并且在生产线上已经可靠地工作了三年。
This paper describes a the accuracy of grating linear scales by laser heterodyne interfer-ometry, and introduces the characteristic of the instrument for it. The accuracy of the instrument is about 1.5m in the range of 2.2m.
出处
《光学精密工程》
EI
CAS
CSCD
1993年第2期14-19,共6页
Optics and Precision Engineering
关键词
光栅尺
激光差外干涉
测量仪
Grating linear scales, Laser heterodyne interferometry, Measurement instrument
