摘要
描述在拍波干涉测长中使用的几种拍波干涉条纹尾数测量方法,提出一种拍波锁相型对准原理,介绍和比较拍波干涉仪的三个原理方案,讨论测量方法和测量精度等问题.
The several measurement methods of beat-wave interference fringe fraction used in beat-wave interferometer are described. The principle of the beat-wave phase-locked type of aiming technique is proposed. The three principle schemes of the beat-wave interferometer are presented. The measurement accuracy and some other problems are discussed and compared.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1993年第3期262-267,共6页
Acta Optica Sinica
关键词
拍波干涉仪
尾数
长度测定
干涉仪
two wavelength interferometry, beat-wave interferometer, excess fractions, large length measurements.
