摘要
单波长监控很难精确控制宽波段上的光学特性 若采用宽光谱扫描可以在很宽的波长范围内监控薄膜特性 ,则控制既直观又准确 虽然宽光谱监控的思想很早就提出了 ,但这项技术的实用性一直不高 开发了一套宽光谱监控系统 ,使用线阵CCD配合计算机 ,可以实现光谱快速扫描 通过采用一些特殊的方法 ,系统可以达到较高的精度 配合改进的光学薄膜监控软件 。
It is hard to precisely control optical characteristic of thin film in wide band using the single wavelength monitor due to the material dispersion, monitoring precision and something else. Broadband monitor can monitor optical characteristic for wide band, therefore it is convenient and precise. However while the thought of broadband monitor had been brought forward, practicability of this kind monitor is low. Recently, with the development of electronics technology and computer technology, make it possible to develop high performance broadband monitor. A new broadband monitor is developed using linear CCD as detector, it can do spectrum scanning very quickly. System can achieve high measuring precision, working with advanced optical thin film coating program, system can fulfill the requirement for automatic control based on broadband monitor.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2004年第9期1136-1139,共4页
Acta Photonica Sinica
关键词
自动控制
宽光谱监控
膜厚监控
在线监控
光学薄膜
Auto Control
Broadband monitoring
Optical thickness monitor
In-situ monitor
Optical coatings
