摘要
要求不断增大晶棒直径、不断提高晶体质量的晶圆市场 ,推动我国直拉单晶炉产品系列出现过三代更替 ,与此对应 ,产品赖以存在的技术平台也经历了三个阶段的演进。第四代产品研发需要在以往技术积累基础上 ,在炉室材料、炉体结构、焊接工艺、机械传动和电气控制、计算机智能控制、磁场发生装置和热场材料等方面进行新一轮技术创新。
The crystal wafer market requires large dimension crystal ingots with high quality. This demand impulses the CZ-crystal pullers' development. Over the past years, three generations of our puller products have met the crystal production requirements in three different periods. In order to develop the fourth generation product, new technique innovation based on the previous technique accumulation is crucial, i. e. to select appropriate materials, to optimize logical furnace structure, to use reasonable welding methods, to develop trusty machine driver, to take modern electric control systems, to realize intelligent control by computer, to design and manufacture an available magnetic field device and to choose new heat field materials.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2004年第3期448-454,共7页
Journal of Synthetic Crystals
