摘要
介绍了石英摆片加工制造过程中若干工艺问题的研究结果。讨论了采用传统加工方法和特种加工方法可能产生的表面缺陷和残余应力.通过对石英摆片材料性质,结构特点和加工机理的分析和研究,提出了保证摆片尺寸和形状精度、表面完整性、强度、使用寿命和可靠性的措施.
Some research results of techniques used in manufacturing process of quartz reed are presented.The surface flaws and residual stresses which can be introduced by both conventional and non-conventional machining methods are discussed.Throughextensive study on the material property,structure characteristic and machining mecha-nism of the quartz reed,a measure that can guarantee the dimensional and geometricalaccuracy,surface integrity,strength,lifetime and reliable performance of the quartzreed is given.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
1993年第6期86-89,共4页
Journal of Harbin Institute of Technology
关键词
石英摆片
特种加工
加速度计
工艺
Quartz reed
chemical etching
non-conventional machining
