摘要
在较高真空度条件下 (10 - 1 Pa)对奥氏体不锈钢进行等离子体源离子渗氮 多弧离子镀膜复合表面改性 ,并采用X射线衍射、金相显微镜、电子探针等手段分析了薄膜的结构和成分 ,探讨了复合处理过程中的组织结构变化。结果表明 :380℃离子渗氮 3h ,表面可形成 10 μm厚的化合物层 ;复合处理后 ,试样表面硬度为 2 10 0 2 4 0 0HV。
The combination technology of plasma nitriding and depositing TiN film by multi-arc ion plating under higher vacuum (10 -1Pa) on stainless steel substrate is introduced. The structures and composition of the coating are analyzed by X-ray diffraction, optical microscope, electron probe. The results show that the compound layer of 10μm is formed in the surface of stainless steel after plasma nitriding at 380℃ for 3 hours. The hardness of the coating,in which the main phase is TiN,obtained by plasma nitriding and multi-arc ion plating is 2100-2400 HV.
出处
《材料热处理学报》
EI
CAS
CSCD
北大核心
2004年第4期57-59,共3页
Transactions of Materials and Heat Treatment
基金
国家高技术研究发展计划 863资助项目(2 0 0 1AA3380 1 0 )
关键词
等离子体源
离子渗氮
多弧离子镀
不锈钢
plasma source
plasma nitriding
multi-arc ion plating
stainless steel
