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WO_3薄膜材料的气敏性能 被引量:13

GAS SENSING PROPERTIES OF WO_(3) THIN FILMS
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摘要 研究了WO3薄膜材料的制备工艺、气敏性能和贵金属表面改性。以钨酸为原料、加入有机络合剂的无机盐溶胶凝胶(inorganic solgelmethod,ISG)法合成了WO3薄膜。确定了最佳ISG工艺制度,即以柠檬酸为络合剂,10次成膜,预处理温度为600℃,烧成温度为650℃。实验结果表明:WO3是一种n型半导体,其最佳工作温度为550℃。通过掺杂贵金属制备了Pt/WO3薄膜材料,有效地改善了薄膜的气敏性能,可以在600℃下获得高达4100的灵敏度。WO3的气敏机理为表面控制型。 The synthesis process, gas sensitivity and surface modification by noble met al for WO3 thin films were investigated. WO3 thin film was prepared by inorganic-sol-gel (ISG) method using tungstenic acid as raw material and adding organic chelating agent. The optimal process parameters of ISG process are as follows: citric acid as chelating agent, dip-coating for ten times, pretreated at 600°C and sintered at 650°C. The testing results show that WO3 is a kind of n-type semiconductor and the most optimum working temperature is 550°C. The doping of Pt on WO3 surface can improve the sensitivity of the thin film effectively, and the sensitivity reaches to 4100 at 600°C. The mechanism of gas sensing properties of WO3 can be described as surface reaction control model.
出处 《硅酸盐学报》 EI CAS CSCD 北大核心 2004年第9期1064-1067,共4页 Journal of The Chinese Ceramic Society
基金 国家基金委重大项目(599955206) 国家自然科学基金(50072014)资助项目。
关键词 氧化钨薄膜 无机盐溶胶-凝胶法 氧气敏感 表面修饰 Crystal structure Platinum Semiconductor doping Sol gels Surface treatment
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参考文献3

  • 1LEGORE L J, LAD R J, MOULZOLF S C, et al. Defects and morphology of tungsten trioxide thin films [J]. Thin Solid Films,2002,406:79-80.
  • 2SOLIS J L, SAUKKO S, KISH L B, et al, Nanocrystalline tungsten oxide thick-films with high sensitivity to H2S at room temperature [J]. Sens Actuators B,2001,77 :316-321.
  • 3DAVID W E. Semiconducting oxides as gas-sensitive resistors[J]. Sens Actuators B,1999,57:1-16.

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