摘要
利用激光分子束外延技术在LaAlO3(100)单晶基片表面生长SrTiO3(STO)薄膜。通过反射式高能电子衍射原位实时监测STO薄膜自组装生长过程,采用原子力显微镜分析自组装生长演化过程,并利用X射线衍射分析薄膜结构及其生长方向。对不同生长条件下薄膜的生长的研究发现:在较低生长温度时,STO薄膜在(200)方向上以三维岛状模式进行生长,小岛在单位原胞尺度呈波浪状周期性排列,即出现自组装生长;而在较高的生长温度时,薄膜以层状模式进行生长自组装行为被抑止。并据此讨论了STO多元氧化物薄膜自组装生长条件及生长机理。
SrTiO3 (STO) thin films were fabricated on LaAlO3 (100) single crystal substrates by the laser molecular beam epitaxy method. The self-assembled growth process of STO thin films was in situ monitored by reflective high energy electron diffraction. The morphology and self-assembled growth evolution of the films were analyzed by atomic force microscopy. X-ray diffraction was employed to study the structure and the growth orientation of the films. At lower growth temperatures the STO films grow along (200) direction in 3-dimensional island mode, which exhibits the periodic corrugated structure to form an unique nanoassembled template. However at higher deposition temperatures the films without the nanoassembled structure grow in layer-by-layer mode and the self-assembled growth behavior of the films is restrained. The mechanism and growth conditions of self-assembled growth of multicomponents complex oxide thin films are discussed.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2004年第9期1073-1077,共5页
Journal of The Chinese Ceramic Society
关键词
自组装生长
多元氧化物薄膜
钛酸锶
Crystal orientation
Morphology
Single crystals
Thin films
