摘要
简介了上海某微电子厂的工艺并经过经济技术比较采用一次回风加FFU空调系统。
This paper introduced briefly an air handling system with primary recircle and FFU in a micro-electronic facility corporation Shanghai by economic and technique way.
出处
《洁净与空调技术》
2004年第3期60-62,共3页
Contamination Control & Air-Conditioning Technology
