摘要
阐述了双侧梳状电容微加速度计的基本结构和工作原理,运用了计算机辅助软件对其进行建模和仿真,借助该模型分析了在 1g 加速下梁的长度变化对系统灵敏度的影响和系统对正弦激脉冲输入信号的响应特性,为加速度计的结构优化设计提供了依据。
In this paper, the basic structure and operation principle of multi-finger capacitive micro-accelerometer are expatiated, the modeling and simulation of the micro-accelerometer are made by using a new kind of computer sofeware. Simulative results indicate that the system sensitivity is seriously influenced by the length of the beam. The system responses to sinusoidal and pulse input signals are also investigated, which offers basis for the structure design of micro-accelerometer.
出处
《探测与控制学报》
CSCD
北大核心
2004年第4期21-24,共4页
Journal of Detection & Control
关键词
梳齿状电容微加速度计
灵敏度
建模和仿真
capacitive micro-accelerometer
sensitivity
modeling and simulation
