摘要
以钛酸丁酯为前驱液,聚乙二醇2000为模板剂,采用溶胶 凝胶模板法在温和的条件下合成了纳米晶TiO2薄膜,并对其晶相、颗粒大小和表面形貌等进行了表征。结果表明,所制备的TiO2薄膜表面完整,无明显的裂纹,颗粒分布均匀,粒径和膜厚度保持在纳米级。电学性能测试表明,纳米晶TiO2薄膜在350℃具有p 型半导体特性,p 型TiO2半导体纳晶薄膜在新型气体传感器开发领域有着潜在的应用前景。
Nanometer titania inorganic film using polyethylene glycol(PEG) as matrix and tetrabutylorthotitanate as inorganic precursor was successfully prepared. SEM,XRD and XPS were used to characterize the microstructure and crystallite morphology. The nanocrystalline TiO_2 films were integral and crack-free with small pores, whose crystallitic sizes were nanometer and even. The films spinned on sapphire tended to show semiconducting properties at 350 ℃. The p-type TiO_2 thin films have potential for development of a novel gas sensor.
出处
《化学工业与工程》
CAS
2005年第1期1-3,61,共4页
Chemical Industry and Engineering
基金
国家自然科学基金(29906006)
天津市自然科学基金(02306211)资助项目
关键词
纳米晶
氧化物半导体
PEG模板
nano-crystalline
metal oxide semiconductor
PEG Template
