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超硬纳米多层膜和复合膜的研究综述 被引量:12

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摘要 综述了近年来纳米多层膜和复合超硬涂层研究的最新进展,分析了Ti/TiN、氮化物/氮化物多层膜和Ti-Si-N及Ti-Al-Si-N系复合膜的最新研究现状,详述了纳米多层膜和复合超硬涂层的致硬机理和设计方法,展望了今后纳米多层膜和复合超硬涂层的研究方向.
出处 《自然科学进展》 北大核心 2005年第1期21-28,共8页
基金 国家自然科学基金资助项目(批准号:50372024)
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