摘要
报道了一种用透射谱数据分析法计算非晶硅碳薄膜的厚度、折射率、吸收系数和光学带隙等光学常数的方法和程序 .这一方法引用有效谐振子模型理论的折射率色散关系 ,所有公式均为解析表达式 ,便于进行数据处理 ,无须专用软件 ,使用Excel即可完成 ,适用于多种半导体薄膜材料 .将这种方法应用于PECVD方法制备的非晶硅碳(a SiC∶H)薄膜 。
Simplified formulae and procedures are presented to compute thickness,refractive index,absorption coefficient,and optical Tauc’s gap of a-SiC∶H films by the transmission spectrum alone.An appropriate functional dependence of the refractive index on the wavelength,based on the single-effective-oscillator model,is given as a priori information of this reverse optical engineering process.All formulae are in closed form and the computations can be easily carried out on PC computer that is available in laboratories anywhere.The computation procedure has been successfully implemented for amorphous silicon carbide films prepared by PECVD.
基金
国家重点基础研究发展计划资助项目 (批准号 :G2 0 0 0 0 2 82 0 1)~~
关键词
光学常数
透射谱
非晶硅碳薄膜
optical constants
transmission spectrum
amorphous silicon carbide
